Given the fault symptoms for ECM 4405 Flow too low, are exactly what you're having, sort the EGR code before concerning yourself with anything else.
There are also EGR Parameters and Activations and descriptions of what to look for in Diagnostics >Vehicle Communication >ECM
No doubt there's further EGR information in product specifications too as per the MAF.
Also, given the very simple MAF solution, check the absolute basics first like fuses and whether the EGR is even plugged in given you've been at that area previously.
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2002 S60 SE D5 Manual
209000 miles
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